은광용 이광렬 2024-01-12T11:01:43Z 2024-01-12T11:01:43Z 1998-07-10 https://pubs.kist.re.kr/handle/201004/85086 고주파　플라즈마　화학증착법을　이용한원형　기판용　코팅층의　대량　합성장　치　및　합성방법 Patent 1998-07-10 1995-08-17 2801565 7-209392 JA 특허 한국과학기술연구원