민석기 권철순 김용태 2024-01-12T11:03:03Z 2024-01-12T11:03:03Z 1999-05-24 https://pubs.kist.re.kr/handle/201004/85144 반도체　금속박막의　배선방법 Patent 1999-05-24 1996-04-04 215540 96-10174 KO 특허 한국과학기술연구원