Jung, Jae Hoon Ju, Byeong Kwon Lee, Yun Hi Park, Kyu Chang Jang, Jin Jung, Yu Ho Kim, Chul Ju Oh, Myung Hwan 2024-01-12T11:38:59Z 2024-01-12T11:38:59Z 2022-03-07 1996-07 0000-0000 https://pubs.kist.re.kr/handle/201004/85924 We have improved an emission stability of Mo tips FEA (field emitter array). The effect of DLC (Diamond Like Carbon) films coated by layer-by-layer technique using PECVD on the electron emission characteristics of Mo tips FEA is examined. Turn-on voltage was lowered from 80 V for Mo tips to 65 V for DLC coated Mo tips FEA and maximum emission current was increased from 140 μA for Mo tips to 320 μA for DLC coated Mo tips FEA. An anode current for DLC coated Mo tips and Mo tips FEA of 0.1 μA per emitter are measured at the gate voltage of about 87 V and 107 V, respectively. And the emission current of DLC coated Mo tips FEA was more stable than that of Mo tips FEA. English IEEE Emission stability of DLC coated metal-tips FEA Conference 1 1996 9th International Vacuum Microelectronics Conference, IVMC, pp.231 - 234 1996 9th International Vacuum Microelectronics Conference, IVMC 231 234 US St.Petersburg, Russia 1996-07-07 Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC 2-s2.0-0030354220