CHOI, WON KOOK 2024-01-12T11:40:17Z 2024-01-12T11:40:17Z 2022-01-14 1995-08-01 https://pubs.kist.re.kr/handle/201004/85982 keV surface modification and thin film growth Conference 1 한국진공학회, pp.95 - 101 한국진공학회 95 101 Proc. of the 2nd Korea-China symposium on ion beam modification of materials and thin film materials