Kim, Yong Tae 2024-01-12T11:41:17Z 2024-01-12T11:41:17Z 2022-01-14 1994-07-01 https://pubs.kist.re.kr/handle/201004/86026 Comparization of amorphous and polycrystalline tungsten nitride diffusion barrier for MOCVD-Cu metallization Conference 1 1994 Fall Meeting of MRS, pp.0 1994 Fall Meeting of MRS 0 0