Kim, Yong Tae 2024-01-12T11:41:18Z 2024-01-12T11:41:18Z 2022-01-14 1994-07-01 https://pubs.kist.re.kr/handle/201004/86027 Thermal stability of plasma deposited tungsten nitride thin films for VLSI devices Conference 1 1-st China-Korea Sym.on Thin Film Materials, pp.0 1-st China-Korea Sym.on Thin Film Materials 0 0