Kim, Yong Tae 2024-01-12T11:41:21Z 2024-01-12T11:41:21Z 2022-01-14 1994-07-01 https://pubs.kist.re.kr/handle/201004/86029 TEM studies of plasma deposited tungsten and tungsten nitride barriers for thermally stable metallization Conference 1 Material Res. Soc. Symp.Proc, pp.335 - 340 Material Res. Soc. Symp.Proc 335 340