HAN, SEUNG HEE 2024-01-12T11:41:35Z 2024-01-12T11:41:35Z 2022-01-14 1994-01-01 https://pubs.kist.re.kr/handle/201004/86040 3-DIMENSIONAL SURFACE MODIFICATION ITH DUAL-MODE PLASMA SOURCE ION IMPLANTATION TECHNIQUE Conference 2 KOREA ACCELERATOR & PLASMA RESEARCH ASSOCIATION KOREA ACCELERATOR & PLASMA RESEARCH ASSOCIATION