Baik, Young Joon 임관원 Shim Young Sub 허주열 이재훈 JONG-KEUK, PARK Lee, Wook Seong 2024-01-12T13:42:31Z 2024-01-12T13:42:31Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/88360 English International Conference on Plasma Surface Engineering, 9.12~16, 독일 Superhad SiC thin film deposited by UBM sputtering method Conference 1 PSE2016 PSE2016 GW