Jung Min Ki Yong Soo Kim Kim Younghee Kim, Yong Tae Hamin Sung Jomsool Kim Ju Han Lee Jhon, Young Min 2024-01-12T14:06:06Z 2024-01-12T14:06:06Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/88853 English 11.8~11, 교토 High Harmonic Generation EUV Optimization of High Harmonic Generation of Coherent EUV Light for EUV Metrology: Simulations and Experiments Conference 1 International Microprocesses and Nanotechnology Conference 2016, v.11P-11-98L International Microprocesses and Nanotechnology Conference 2016 11P-11-98L JA