Lee, Byung Chul Amin Nikoozadeh Kwan Kyu Park Butrus T. Khuri-Yakub 2024-01-12T14:35:39Z 2024-01-12T14:35:39Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/89453 English Fabrication of CMUTs with Substrate-embedded Springs Conference 1 IEEE International Ultrasonics Symposium 2013, pp.1733 - 1736 IEEE International Ultrasonics Symposium 2013 1733 1736 XR