Park Han Young Kim Yong Soo 성하민 김점술 이주한 Jhon, Young Min 2024-01-12T14:36:03Z 2024-01-12T14:36:03Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/89489 English Extreme Ultraviolet High Harmonics EUV Source Coherence Coherent EUV Light Source using a Gas Capillary based on High-order Harmonic Generation 가스 캐필러리를 이용한 고차조화파 생성 기반의 결맞는 극자외선 광원 Conference 2 Photonics Conference 2015 Photonics Conference 2015 KO