Jeong Seong Pil Bae Hyokwan Cho Kyungjin Choi min kyu Yang Seung- Heon JEONG DAWOON Taekgeun Yun Koo Heoncheol Lee, Seockheon 2024-01-12T15:06:41Z 2024-01-12T15:06:41Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/90061 English Ultrapure water patent survey Current technologies on ultrapure water production: based on the patent survey Conference 1 IEEC 2015 IEEC 2015 KO