Jin Chang Kyu Do Kyung Hwang Tae-Hwan Kim CHOI, WON-KOOK 2024-01-12T16:04:45Z 2024-01-12T16:04:45Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/91093 English SiOXNY Encapsulation film Plasma Enhanced Chemical Vapor Deposition SiOXNY Encapsulation film Fabricated by Plasma Enhanced Chemical Vapor Deposition Conference 2 한국물리학회 학술논문발표회 한국물리학회 학술논문발표회 KO