Jin Chang Kyu Do Kyung Hwang Tae-Whan Kim Kyung-Kon Kim CHOI, WON-KOOK 2024-01-12T16:04:45Z 2024-01-12T16:04:45Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/91094 English SiOxNy barrier film flexible organic photovoltaic plasma enhanced chemical vapor deposition Fabrication of SiOxNy barrier film for flexible organic photovoltaic by plasma enhanced chemical vapor deposition Conference 1 International Conference on Microelectronics and Plasma Technology 2014 International Conference on Microelectronics and Plasma Technology 2014 KO