Jin Chang Kyu Do Kyung Hwang Tae-Hwan Kimb CHOI, WON-KOOK 2024-01-12T16:04:46Z 2024-01-12T16:04:46Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/91095 English Multilayer barrier film PECVD (Plasma Enhanced Chemical Vapor Deposition) ALD(Atomic Layer Deposition) Barrier film WVTR (Water Vapor Transmission Rate) Multilayer barrier film fabricated by Plasma Enhanced Chemical Vapor Deposition and Atomic Layer Deposition Conference 2 한국진공학회 한국진공학회 KO