Jhon, Young Min Kim Yong Soo Ahn Joonmo Sung, Hamin Cho, Woon Jo Park, Min-Chul Kim, Jomsool Lee, Ju Han KIM, JAE HUN MINAH SEO Lee, Seok Kim, Yong Tae 2024-01-12T16:04:54Z 2024-01-12T16:04:54Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/91106 English EUV Mask Inspection Coherent Output Characteristics of a Coherent EUV Light Source for EUV Mask Inspection 극자외선 마스크 검사용 결맞는 극자외선 광원의 출력특성 Conference 2 차세대 리소그래피 학술대회, pp.57 - 58 차세대 리소그래피 학술대회 57 58 KO