Hyun-Soo, Kim Jaihyung Won Kim, Yong Tae Manyoung Sung 2024-01-12T17:35:48Z 2024-01-12T17:35:48Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/92864 English MRS The study of Ge2Sb2Te5 films surface after chemical mechanical planarization in various slurries condition Conference 1 2013 MRS Spring Meeting 2013 MRS Spring Meeting US