Hun-su Lee Yun-seong Lee Hong-young Chang 2024-01-12T19:34:54Z 2024-01-12T19:34:54Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/95013 English A capacitively coupled plasma discharge with segmented multi-holed electrode on large area Conference 1 ICMAP ICMAP KO