Hun-su Lee Eun-ae Kim Hong-young Chang 2024-01-12T19:34:55Z 2024-01-12T19:34:55Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/95015 English Frequency effect of multi hole RF CCP Discharge Conference 2 한국진공학회 한국진공학회 KO