Song, Hyun - Cheol KANG, CHONG YUN YOON, SEOK JIN 2024-01-12T19:36:34Z 2024-01-12T19:36:34Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/95149 English energy harvesting MEMS low resonance frequency Low Resonance Frequency MEMS Piezoelectric Energy Harvester with Shear Mode Conference 1 38th International Conference on Micro and Nano Engineering, pp.62 38th International Conference on Micro and Nano Engineering 62 62 FR