JONG-KEUK, PARK Ko Ji sun Lee, Wook Seong Baik, Young Joon 2024-01-12T19:36:45Z 2024-01-12T19:36:45Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/95164 English Effect of hydrogen addition on the residual stress of cubic boron nitride film prepared by R.F. magnetron sputtering of B4C target Conference 1 ICMCTF-2012 ICMCTF-2012 US