민석기 한철원 박승철 2024-01-12T21:03:03Z 2024-01-12T21:03:03Z 1993-02-16 https://pubs.kist.re.kr/handle/201004/96568 디렉트　모니터링　전기로를　이용한　수평브리지만　단결정　성장장치 Patent 1993-02-16 1990-05-01 5,186,911 07/517,564 US 특허 한국과학기술연구원