Hun-su Lee Yun-Seong Lee Sang-Hun Seo Hong-Young Chang 2024-01-12T21:37:31Z 2024-01-12T21:37:31Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/97450 English Hollow cathode plasma density frequency multi hole electrode FREQUENCY EFFECT OF MULTI HOLE RF CCP DISCHARGE Conference 1 IFFM2011 IFFM2011 KO