Fabrication of superhydrophobic Si nanowire patterned surfaces using CF4 plasma - Her Eun kyu; Cha Tae-Gon; Myoung-Woon Moon; Lee, Kwang Ryeol; 오규환; 김호영
Keywords: si nanowire; plasma; nanopattern; biomimetic; superhydrophobic; PACVD; Si nanowire; hierarchical structure