Nano-patterning of Poly (methyl-methacrylate) Polymeric Surface and Effects of Pitch on Hydrophobicity and Tribological Properties - Yoon, Eui Sung; Pham Duc Cuong; Arvind Singh; KIM, JINSEOK; Yang Sung Wook; Kawk, Moon Kyu; Kahp-Yang Suh
Keywords: MEMS devices; AFM; surface modification