Large area 3D nanoscale metal etching process - Kim Moo Hyun; Lee, Byung Chul; C. Jegatha; Kim Sang Kyung; Shin, Hyun Joon; Kim, Jung Sik; Moon, Sung Wook
Keywords: 무전해도금; 선택적 습식식각; 나노에칭 공정; MEMS; NEMS; electroless plating; selective wet etching; etching process