Lattice distortion of transparent conductive AlGaZnO thin films prepared by RF magnetron sputtering - Kim Tae-hoon; Shin Sang-Hoon; Kim In-ho; KIM, WON MOK; Lee, Jeon Kook
Keywords: AlGaZnO; Transparent Conductive Oxide; Co-sputtering; Lattice distortion; electrtical resistivity