Improvement of linearity and Resolution in Capacitive Micro Tilt Sensor by Using Modified Comb Finger Shape - SON JUN HYUK; SeungHun LEE; Cheung Il Jin; KIM HYUNG WON; Kim, Kwang Ho; Shim, Jae Wan; Shin, Hyun Joon; Sung-Woo Hwang; Moon, Sung Wook