The Structure and Properties of ta-C Film with Dispersion of Incident Beam Energy - LEE SEUNG HYEOB; Kim Tae Young; SEUNG CHEOL, LEE; Y-C. Chung; D. W. Brenner; Lee, Kwang Ryeol
Keywords: MD; carbon; structure; stress; tetrahedral amorphous carbon; molecular dynamics simulation; Dispersed Incident Energy; compressive residual stress