Uncooled infrared sensor by MEMS technology - HAN YONG HEE; Kim Kun Tae; Shin, Hyun Joon; An Mi Suk; Kim, Shin Keun; Moon, Sung Wook; Choi In-Hoon; Oh Myung-Hwan
Keywords: MEMS; 볼로메타; 적외선 센서