Fabrication of 3D MEMS antenna array structure for uncooled IR sensor using MRPBI system and plastic micromachining - JONG-YEON PARK; Kun-Tae Kim; 이준섭; LEE TAE HUN; Kwon Gwang Min; Shin Hyun Joon; Moon Sung Wook; PARK JEONG HO
Keywords: MRPBI system; UV-lithography; IR sensor; 3D MEMS antenna