A comparative study for the characteristics of VOx thin films fabricated by thermal oxidation and sputtering methods - PARK CHUL WOO; KIM MIN CHEOL; KANG HO KWAN; Moon Sung Wook; OH MYUNG HWAN; 정홍배
Keywords: 열산화법; sputtering법; 산화 바나듐; 박막; 특성비교; sputtering; oxidation; TCR