Epitaxial growth of deep ultraviolet light emitting diodes with two-step n-AlGaN layer - So, Byeongchan; Cheon, Changheon; Lee, Joohyoung; Lee, Junchae; Kwak, Taemyung; Choi, Uiho; Song, JinDong; Chang, Joonyeon; Nam, Okhyun (ELSEVIER SCIENCE SA, 2020)
Keywords: CRACK-FREE; THICK ALN; SAPPHIRE; FILMS