TRISILAALKANES - NEW PRECURSORS FOR ULTRAFINE BETA-SILICON CARBIDE POWDERS - LEE, GH; SONG, CH; JUNG, IN (KOREAN CHEMICAL SOC, 1993)
Keywords: CHEMICAL VAPOR-DEPOSITION; GAS-PHASE REACTION; SIH4-CH4-H2 SYSTEM; SIC POWDERS; CARBOSILANES; PARTICLES