Actinic EUV Mask Inspection using Coherent EUV Light from High Harmonic Generation - MOON BYUNGHYUCK; Yong Soo Kim; Kim, Yong Tae; Hamin Sung; Jomsool Kim; Byeong-Kwon Ju; Jhon, Young Min (11.8~11, 교토)
Keywords: EUV; High Harmonic Generation; Mask Inspection