Multilayer barrier film fabricated by Plasma Enhanced Chemical Vapor Deposition and Atomic Layer Deposition - Jin Chang Kyu; Do Kyung Hwang; Tae-Hwan Kimb; CHOI, WON-KOOK
Keywords: Multilayer barrier film; PECVD (Plasma Enhanced Chemical Vapor Deposition); ALD(Atomic Layer Deposition); Barrier film; WVTR (Water Vapor Transmission Rate)