KIST Library Institutional Repository

Characteristics of Al:doped ZnO Thin Films by HIPIMS (High Power Impulse Magnetron Sputtering) with Unbalanced Magnetron

Authors

Park Dong Hee; Yang Jeong-do; HONG TAE WOO; Ji-Won Choi; CHOI, WON-KOOK

Citation

Society of Vacuum Coaters Technical Conference Proceedings, pp.32 - 35

Keywords

HIPIMS; Unbalanced magnetron; AZO

ISSN

0737-5921

URI

https://pubs.kist.re.kr/handle/201004/100118

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML