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Fabrication of nano/micro-scale hierarchical structures for reducing adhesion and friction forces on silicon surfaces

Authors

Pham Duc Cuong; Na, Kyounghwan; Piao Shuxue; Yang Sung Wook; KIM, JINSEOK; Yoon, Eui Sung

Citation

STLE 65th Annual Meeting, pp.45

Keywords

Surface modification; Hierarchical structure; Adhesion; Friction; PFPE

URI

https://pubs.kist.re.kr/handle/201004/100342

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KIST Conference Paper > Others

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