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Spiral Type Piezoelectric MEMS Power Generator with Shear Mode

Authors

Song, Hyun - Cheol; KANG, CHONG YUN; YOON, SEOK JIN

Citation

한국세라믹학회

Keywords

Energy harvesting; MEMS; shear mode; spiral

URI

https://pubs.kist.re.kr/handle/201004/100356

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KIST Conference Paper > Others

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