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Effect of UV-siisted RTA on the electrical properties of (Ba,Sr)TiO3 films for MIM capacitor

Authors

Cho Kwang Hwan; Kang, Min-Gyu; KANG, CHONG YUN; YOON, SEOK JIN; 이영백

Citation

ICAMD

URI

https://pubs.kist.re.kr/handle/201004/100498

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KIST Conference Paper > Others

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