Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | HAN, SEUNG HEE | - |
| dc.contributor.author | Park Won Woong | - |
| dc.contributor.author | JEON JUN HONG | - |
| dc.contributor.author | Choi Jin-young | - |
| dc.date.accessioned | 2024-01-13T00:33:06Z | - |
| dc.date.available | 2024-01-13T00:33:06Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/100505 | - |
| dc.language | English | - |
| dc.title | Research Activities on PIII&D(Plasma Immersion Ion Implantation and Deposition) Technology at KIST | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | MRS-J, 2009 | - |
| dc.citation.title | MRS-J, 2009 | - |
| dc.citation.conferencePlace | JA | - |
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