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Effect of deposition temperature and Ga content on the properties of Ga-doped ZnO films

Authors

Son Ju Myeong; Kim Yong Hyun; LEE, TAEK SUNG; CHEONG, BYUNG KI; Jeung-hyun Jeong; D.Y. Jeong; T.-Y. Seong; KIM, WON MOK

Citation

19th International Photovoltaic Science and Engineering Conference, pp.350

Keywords

TCO; Ga-doped ZnO; Deposition temperature; rf magnetron sputtering

URI

https://pubs.kist.re.kr/handle/201004/100725

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KIST Conference Paper > Others

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