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dc.contributor.authorLee Eui-Bok-
dc.contributor.authorKi Young Dong-
dc.contributor.authorJinn Il Choi-
dc.contributor.authorByoeng Kwon Ju-
dc.contributor.authorKim, Yong Tae-
dc.date.accessioned2024-01-13T01:03:30Z-
dc.date.available2024-01-13T01:03:30Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/100789-
dc.languageEnglish-
dc.subjectphase change pillars-
dc.subjectlithography-
dc.titleFabrication of patterned phase change pillars by laser interference lithography-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationThe 2nd International Conference on Microelectronics and Plasma Technology, pp.172-
dc.citation.titleThe 2nd International Conference on Microelectronics and Plasma Technology-
dc.citation.startPage172-
dc.citation.endPage172-
dc.citation.conferencePlaceKO-
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