Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee Eui-Bok | - |
| dc.contributor.author | Ki Young Dong | - |
| dc.contributor.author | Jinn Il Choi | - |
| dc.contributor.author | Byoeng Kwon Ju | - |
| dc.contributor.author | Kim, Yong Tae | - |
| dc.date.accessioned | 2024-01-13T01:03:30Z | - |
| dc.date.available | 2024-01-13T01:03:30Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/100789 | - |
| dc.language | English | - |
| dc.subject | phase change pillars | - |
| dc.subject | lithography | - |
| dc.title | Fabrication of patterned phase change pillars by laser interference lithography | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | The 2nd International Conference on Microelectronics and Plasma Technology, pp.172 | - |
| dc.citation.title | The 2nd International Conference on Microelectronics and Plasma Technology | - |
| dc.citation.startPage | 172 | - |
| dc.citation.endPage | 172 | - |
| dc.citation.conferencePlace | KO | - |
- Appears in Collections:
- KIST Conference Paper > Others
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