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dc.contributor.author정지원-
dc.contributor.author주병권-
dc.contributor.author최두진-
dc.contributor.author오명환-
dc.date.accessioned2015-12-02T04:52:36Z-
dc.date.available2015-12-02T04:52:36Z-
dc.date.issued199804-
dc.identifier.citation, 92-92-
dc.identifier.other9128-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/10124-
dc.publisher한국요업학회 춘계연구발표회-
dc.subjectMEMS-
dc.titleSilicon-to-silicon electrostatic bonding using lithia-silicate glass interlayer-
dc.typeConference Paper-
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