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Adhesion and friction forces on silicon wafers with dual surface modifications at nano-scale

Authors

Na, Kyounghwan; Arvind Singh; Pham Duc Cuong; Yang Sung Wook; Yoon, Eui Sung

Citation

Society of Tribologists and Lubrication Engineers 64th Annual Meeting and Exhibition

Keywords

Surface modification; topographical; chemical; nano-channel; adhesion; frictioin; tribology

URI

https://pubs.kist.re.kr/handle/201004/101398

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KIST Conference Paper > Others

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