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A modeling of electrostatic capacitance and moving force in comb actuator for controlling a micro-optical switch

Title
A modeling of electrostatic capacitance and moving force in comb actuator for controlling a micro-optical switch
Authors
채경수; 문성욱; 오명환; 박영균; 김성일; 박정호
Keywords
초소형 광스위치
Issue Date
1999-11
Publisher
센서학회지
Citation
VOL 10, NO 1, 193-197
URI
https://pubs.kist.re.kr/handle/201004/10184
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KIST Publication > Conference Paper
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