Analysis of fluorine-containing thin films using surface techniques

Authors
Youngsoo, KimKang-Jin KimLEE, YEON HEE
Citation
The 9th Asian conference on analytical sciences, pp.266
Keywords
fluorine; plasma polymerization; ICP; CCP; XPS; TOF-SIMS
URI
https://pubs.kist.re.kr/handle/201004/101899
Appears in Collections:
KIST Conference Paper > Others
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