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Fabrication of piezoresistive pressure sensor based on poly-Si

Title
Fabrication of piezoresistive pressure sensor based on poly-Si
Authors
임재홍; 윤석진; 주병권; 윤영수
Keywords
piezoresistivity
Issue Date
1999-11
Publisher
한국센서학회 종합학술대회 논문집
Citation
, 287-290
URI
https://pubs.kist.re.kr/handle/201004/10190
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KIST Publication > Conference Paper
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