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dc.contributor.authorJong Moon Youn-
dc.contributor.authorChang Woo Sun-
dc.contributor.authorJeong Yong Lee-
dc.contributor.authorKim, Yong Tae-
dc.date.accessioned2024-01-13T03:30:41Z-
dc.date.available2024-01-13T03:30:41Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/101930-
dc.languageEnglish-
dc.subjectTEM-
dc.subjectphase change memory-
dc.subjectPRAM-
dc.subjectcrystallization-
dc.subjectSb-Se-Te-
dc.titleA transmission electron microscopy study on the crystallization of Sb-Se-Te thin films deposited by rf sputtering method-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationThe 14th International Symposium on the Physics of Semiconductor and Applications (ISPSA), pp.308-
dc.citation.titleThe 14th International Symposium on the Physics of Semiconductor and Applications (ISPSA)-
dc.citation.startPage308-
dc.citation.endPage308-
dc.citation.conferencePlaceKO-
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